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ChemicalLog

The following is a list of chemicals stored in the SNF

Solvent

Chlorobenzene

NMP

Acetone

IPA

Resist

S1813

AZ6612

AZnLOF2020

PMMA 950K A3

PMMA 950K A4

LOR5A

PA400R

Developer

MIBK

AZ300MIF

AZ826

PA401D

Acid and Etchant

HCl (37%)

H2SO4 (96%)

HCl (10%) for oxide removal

HCl (1%) for etchant mix

Premix GaAs HF etch: H2O[60], Buffered HF(7:1)[6], H2O2[3]

Premix Sulfuric etch

H2O2(31%)

Sufactant

Triton X100 (20ml of Triton diluted with 200ml of H2O)

Agepon (0.5%)

NCW01 (100%)

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Topic revision: r1 - 30 Mar 2010, AndrewSee
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