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KrFExcimer
(18 Jan 2017,
JeffreyCheung
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Coherent COMPexPro 102F KrF Excimer
Coherent KrF excimer is the ablation laser used to grow epitaxial oxides in the Pascal Laser MBE Systems
Laser Gas Refill Schedule
Fluorine Filter Schedule
Maintenance Log
Laser Gas Refill Schedule
12/01/2017 --
JeffreyCheung
- 18 Jan 2017
Fluorine Filter Schedule
40% --
JeffreyCheung
- 18 Jan 2017
Maintenance Log
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Topic revision: r2 - 18 Jan 2017,
JeffreyCheung
ANFF
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