Coherent COMPexPro 102F KrF Excimer

Coherent KrF excimer is the ablation laser used to grow epitaxial oxides in the Pascal Laser MBE Systems

Laser Gas Refill Schedule

 

Fluorine Filter Schedule

 

Maintenance Log

 

This topic: ANFF > Tools > KrFExcimer
Topic revision: 18 Jan 2017, JeffreyCheung
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