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Pascal Laser MBE Chamber A

Specifications

Parameter Range Units
Temperature 200 to 1100 C
Vacuum 1 to 5E-9 Torr
Shadow mask step size 0.2 mm
RHEED voltage range 0 to 30 kV
Maximum target diameter 1 (25) inch (mm)
Maximum target thickness 0.25 (6) inch (mm)
Target count 6 targets

Allowed Materials

LaAlO 3

08/08/2014

SrTiO 3
NdGaO 3

11/11/2014

SrO

18/08/2015

TiO 2

18/08/2015

(La,Ca)MnO3
CaMnO 3

08/08/2014

*Set ALLOWTOPICVIEW = AnffGeneralGroup

Comments

 
Topic revision: r6 - 18 Jan 2017, JeffreyCheung
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